RF excited CO2 slab waveguide laser

ABSTRACT

A CO 2  slab waveguide laser (10) is disclosed including a pair of spaced apart electrodes (36,38) having opposed light reflecting surfaces. The electrodes are dimensioned in a manner to guide light in a plane perpendicular to the reflecting surfaces. Light parallel to the reflecting surfaces is not constrained other than by the resonator mirrors (30,32). The resonator structure includes a negative branch unstable resonator in the nonwaveguide dimension. A stable resonator is used in the waveguide dimension but the mirror spacing from the end of the guide is based in part on the configuration of the unstable resonator. A unique support structure is disclosed for maintaining the electrodes in a spaced apart orientation without confining the discharge. Further refinements are disclosed for cooling the laser and for accommodating thermal expansion of the parts. Finally, an improved adjustable mirror assembly (26, 28) is provided which allows the tilt angle of the mirror to be varied from outside of the housing.

This is a divisional of application Ser. No. 07/596,672, filed Oct. 12,1990.

TECHNICAL FIELD

The subject invention relates to an RF excited CO₂ slab waveguide laser.

BACKGROUND OF THE INVENTION

There has been considerable investigation into various forms ofwaveguide and slab CO₂ lasers. (See, "The Waveguide Laser: A Review,"Applied Physics, Vol. 11, pages 1-33 (1976)) A waveguide laser differsfrom a conventional laser in that the circulating light is guided oversome portion of the propagation path and does not obey the laws of freespace propagation. The term slab has been used to described lasershaving a rectangular discharge region defined between two planarsurfaces. With respect to the subject invention, the term slab waveguidelaser will be used to describe a laser having a rectangular dischargeregion defined between two narrowly spaced electrodes wherein light isguided in the narrow dimension between the electrodes yet is allowed topropagate in free space in the wider dimension.

The initial work in slab waveguide CO₂ lasers was directed to flowinggas systems where the gas was excited with a DC discharge. (See, forexample, "Optical-gain Measurements in a CW Transverse-discharge,Transverse-gas-flow CO₂ :N₂ :He Planar-Waveguide Laser," McMullen etal., Journal of Applied Physics, Vol. 45, No. 11, November 1974, pg.5084) Efforts to extend the DC excitation approach to sealed CO₂ laserswere not particularly successful.

The first satisfactory excitation scheme for a sealed CO₂ waveguidelaser is described in U.S. Pat. No. 4,169,251, issued Sep. 25, 1979 toLaakmann. The laser disclosed in this patent is transversely excited bya high frequency RF drive. The discharge region is defined between apair of spaced apart, elongated electrodes. The Laakmann patent teacheshow to select the proper RF excitation frequency based upon the spacingbetween the electrodes. Excitation with the proper RF frequency isnecessary to maintain a stable discharge.

The electrodes of the laser disclosed in the Laakmann patent are spacedapart by a pair of elongated dielectric members. The combination of theelectrodes and dielectric members can be used to defined both square andrectangular discharge regions. In the embodiment illustrated in thepatent, the spacing between the dielectric members is narrow enough sothat light is guided in both dimensions, that is, between the electrodesand the dielectric members.

In a effort to increase the power which can be generated for a givenlength of electrodes, the teachings in the Laakmann patent have beenapplied to the development of CO₂ slab waveguide lasers, wherein thelight is guided only between the narrowly spaced electrodes and isallowed to propagate freely in the wider dimension. One of the earliestreports on this type of laser can be found in "Radio-frequency ExcitedStripline CO and CO₂ lasers," Gabai, Hertzberg and Yatsiv, Abstractpresented at Conference on Lasers and Electro-optics, June 1984. In thislaser, a pair of spaced apart water-cooled X-band waveguide electrodeswere excited with an RF discharge at frequencies ranging from 25 to 50MHz. The spacing between the electrodes was on the order of 4.5 mm,which was suitable for guiding light. The wider dimension of theelectrodes was 2.5 cm which allowed the light to freely propagate.Cavity experiments were performed with plane mirrors and a stableresonator. Additional information can be found in a subsequent paper byYatsiv, entitled "Conductively Cooled Capacitively Coupled RF ExcitedCO₂ Lasers," given at the Gas Flow & Chemical Lasers Conference, 1986and published by Springer, Proceedings, 6th Int. Sym, pages 252-257,1987.

Another CO₂ slab waveguide laser is described in U.S. Pat. No.4,719,639, issued Jan. 12, 1988 to Tulip. Similar to the devicedescribed in the Gabai paper, the discharge region in the Tulip deviceis rectangular and configured to guide light between the electrodeswhile allowing the light to propagate in free space in the widerdimension. The Tulip patent also discloses that for a slab laser, it canbe desirable to use an unstable resonator structure in the non-waveguidedirection. The unstable resonator described in Tulip includes oneconcave mirror and one convex mirror and is known in the art as apositive branch unstable resonator.

Still another slab waveguide laser is described in "CO₂ Large-areaDischarge Laser Using an Unstable-waveguide Hybrid Resonator," Jacksonet al., Applied Physics Letters, Vol. 54, No. 20, page 1950, May 1989.As in the laser described in the Tulip patent, the laser of this latterarticle was provided with a positive branch unstable resonator in thenonwaveguide direction.

Still another slab waveguide laser is disclosed in U.S. Pat. No.4,939,738, issued Jul. 3, 1990 to Opower. This slab waveguide laser isalso provided with a positive branch unstable resonator.

Many of the initial CO₂ slab waveguide laser designs reported in theprior literature while showing promise, have not been suitable forcommercial exploitation. More particularly, most of the lasers describedwere essentially for experimental purposes and little effort wasexpended to overcome problems faced when attempting to operate thelasers at high power levels for extended periods of time. For example,in order to provide a commercially acceptable laser, various designissues must be addressed including mirror assemblies, cooling systemsand electrode support structures.

Another problem with the prior art slab lasers is that their resonatorstructures included mirrors which were located quite close to thedischarge and therefore subject to rapid degradation. This resonatorconstruction followed the conventional wisdom of waveguide laser designwhich specifies the optimum placement and radius of the resonatormirrors. More specifically, prior art theory specified that the mirrorsshould either be located very close to the ends of the waveguideelements or spaced a large distance away. By placing the mirrors closeto the end of the waveguide, it was felt that all of the light could beforced back into the waveguide channel. A cavity design where themirrors are placed close to the end of the waveguide was said to have aType I resonator. Mirrors used in a Type I resonator were typicallyflat, or had a very large radius of curvature. While a Type I resonatoris fine for experimentation, degradation of the mirrors due to exposureto the nearby discharge renders this approach unsuitable for commercialapplications.

The prior art waveguide theory also specified that there would be twoadditional locations, spaced far from the end of the waveguide, wheremirrors could be placed and losses could still be minimized. Theselocations were a function of the separation between the electrodes andfor convenience were labeled R and R/2. If the mirrors were placed at adistance R from the end of the waveguide, the resonator was called aType II. If the mirrors were located at the distance R/2, the resonatorwas called as Type III. The radius of curvature of the mirrors in both aType II and Type III resonators is equal to R. The distance R in atypical waveguide configuration turns out to range from about 10 cm toone meter. This additional spacing of both mirrors away from the ends ofthe waveguide is unacceptable in a commercial laser design since itwould add additional space to the laser package and create potentialalignment stability problems.

Accordingly, it is an object of the subject invention to provide a newand improved CO₂ slab waveguide laser.

It is a further object of the subject invention to provide a CO₂ slabwaveguide laser which is stable and generates a high power output for agiven length.

It is another object of the subject invention to provide a CO₂ slabwaveguide laser having an improved resonator structure.

It is still a further object of the subject invention to provide a CO₂slab waveguide laser having a negative branch unstable resonator in thenonwaveguide direction.

It is still another object of the subject invention to provide a CO₂slab waveguide laser having the resonator mirrors spaced away from theends of the guide to reduce degradation.

It is still a further object of the subject invention to provide a CO₂slab waveguide laser having the resonator mirror spacing governed by thegeometry of the negative branch unstable resonator.

It is still another object of the subject invention to provide a CO₂slab waveguide laser having an improved electrode support structure.

It is still a further object of the subject invention to provide a CO₂slab waveguide laser having an electrode support structure which allowsfor thermal expansion of the electrodes.

It is still another object of the subject invention to provide a CO₂slab waveguide laser having an electrode support structure which doesnot confine the discharge.

It is still a further object of the subject invention to provide a CO₂slab waveguide laser having an improved system for cooling theelectrodes.

It is still another object of the subject invention to provide a CO₂slab waveguide laser having improved mirror mounts which allowadjustment from outside the sealed laser housing.

It is still a further object of the subject invention to provide a meansfor preionizing the discharge to facilitate operation.

SUMMARY OF THE INVENTION

In accordance with these and many other objects, the subject inventionprovides for a CO₂ slab waveguide laser which a number of featuresdesigned to enhance performance. The slab laser consists of a pair ofspaced apart, planar electrodes having opposed light reflectingsurfaces. The spacing of the electrodes is arranged such that light willbe guided in a plane perpendicular to the reflecting surfaces. Incontrast, the light in the plane parallel to the light reflectingsurfaces is allowed to propagate in free space and is only confined bythe resonator.

In one aspect of the subject invention, a new resonator structure isused to provide added stability and improved mode quality. Morespecifically, a negative branch unstable resonator structure is selectedfor reflecting light in the nonwaveguide dimension. While negativebranch unstable resonators have been used in other lasers, it does notappear that this structure has been used with a CO₂ slab waveguidelaser. It is believed that prior investigators incorrectly assumed thata negative branch unstable resonator would substantially reduce poweroutput from such a laser. It has been found that the negative branchunstable resonator can be used without a significant reduction in power.

Another feature of the novel resonator design is that the mirrors arespaced a sufficient distance from the ends of the waveguide to reducedegradation problems. This mirror spacing does not follow prior artteachings for waveguide structures. More specifically, the mirrors arespaced from the ends of the guide a distance significantly greater thanin a Type I resonator. In addition, the mirrors are also much closer tothe end of the guide than in either a Type II or Type III resonator.

In accordance with the subject invention, the mirror separation andcurvature is initially selected based on the desired optical outputcoupling of the negative branch unstable portion of the resonator.Preferably spherical mirrors are used to minimize costs. Thus, theradius of curvature of the mirrors in both the waveguide andnonwaveguide dimensions will be the same.

Once the mirror separation and curvature are selected for thenonwaveguide dimension, the length of the waveguide is selected so thatthe spacing between the ends of the guide and mirrors optimizesreflection of the light back into the guide. In accordance with thesubject approach, this optimization is achieved by setting the length ofthe guide so that the radius of curvature of the wavefront of the laserbeam at the mirror location matches the selected radius of curvature ofthe mirrors. It has been found that this approach maximizes power outputeven though prior theory would indicate that losses of roughly fifteenpercent would occur.

Another important feature of the subject laser resides in the supportstructure used to maintain the separation of the electrodes. Morespecifically, in the prior art, the separation of the electrodes wasachieved by mounting a pair of elongated dielectric blocks between theelectrodes. This approach provided the necessary electrical isolationbetween the electrodes. However, the dielectric blocks tend to sharplydefine the edge of the discharge.

In contrast, in accordance with the subject invention, the means forsupporting and isolating the electrodes is spaced from the discharge. Inthis manner, the discharge is not sharply limited but presents anapodized or gentle edge. It is believed that this configurationcontributes to the superior mode performance of the laser. Anotheradvantage to this configuration is that it allows the hot, dissociatedlaser gas to flow freely out of the space between the electrodes whileallowing cooler gas to enter and replenish the discharge.

In another aspect of the electrode support structure, consideration isgiven to accommodating the thermal expansion of the electrodes duringoperation. Accordingly, one end of an electrode is fixedly attached toone end of the housing. The other end of the electrode is slidablymounted to the other end of the housing to allow movement caused bythermal expansion.

The subject invention also includes an improved cooling system. As canbe appreciated, as a laser is run at higher powers, cooling becomes moreimportant. In the past, cooling pipes were simply attached to thesurface of the electrodes. In the subject design, the cooling pipes arelocated in channels formed into the electrodes. Moreover, the specificlocation of the channels is designed to minimize stresses created due todifferences in the coefficient of thermal expansion between the materialof the pipes and the electrodes. The cooling pipes are also designed tominimize shorting between the high voltage electrode and grounded laserhousing.

Another feature of the subject laser is an improved mirror assembly.This mirror assembly allows the angle of the resonator mirrors to beadjusted from outside of the housing without any need for sliding vacuumseals.

Another feature of the subject laser is the inclusion of a low pressuremercury-argon lamp used to preionize the discharge. The lamp allows thelaser to start reliably even at low operating currents.

Further objects and advantages of the subject invention will becomeapparent from the following detailed description, taken in conjunctionwith the drawings in which:

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view, partially in section, of the CO₂ slabwaveguide laser of the subject invention.

FIG. 2 is an exploded perspective view of the CO₂ slab waveguide laserof the subject invention.

FIG. 3 is a cross sectional view of the CO₂ slab waveguide laser of thesubject invention taken along the lines 3--3 of FIG. 1.

FIG. 4 is a cross sectional view of the CO₂ slab waveguide laser of thesubject invention taken along the lines 4--4 of FIG. 3.

FIG. 5 is a cross sectional view of the CO₂ slab waveguide laser of thesubject invention taken along the lines 5--5 of FIG. 1.

FIG. 6 is a cross sectional view of the CO₂ slab waveguide laser of thesubject invention taken along the lines 6--6 of FIG. 5.

FIG. 7 is an exploded view of a portion of the novel electrode supportsystem of the CO₂ slab waveguide laser of the subject invention.

FIG. 8 is a cross sectional view of the mirror mount and output windowof the laser of the subject invention taken along the lines 8--8 of FIG.1.

FIG. 9 is a cross sectional view of the mirror mount of the laser of thesubject invention taken along the lines 9--9 of FIG. 8.

FIG. 10 is a cross sectional view of the mirror mount and output windowof the laser of the subject invention taken along the lines 10--10 ofFIG. 8.

FIG. 11 is a cross sectional view of the other mirror mount of the laserof the subject invention taken along the lines 11--11 of FIG. 1.

FIG. 12 is a cross sectional view of the mirror mount of the laser ofthe subject invention taken along the lines 12--12 of FIG. 11.

FIG. 13 is a cross sectional view of the mirror mount of the laser ofthe subject invention taken along the lines 13--13 of FIG. 11.

FIG. 14 is a plot of the radius of the wavefront as a function of theits distance from the end of the waveguide.

FIG. 15 is a plot of the average output power over time of a laserconstructed in accordance with the subject invention.

FIG. 16 is a plot of the average output power as a function of RF inputpower of a laser constructed in accordance with the subject invention.

FIG. 17 is a plot similar to FIG. 16 showing the effects of differentpulse lengths.

FIG. 18 is a plot similar to FIG. 16 showing the effects of differentgas pressures within the laser.

FIG. 19 is a plot illustrating the change in beam diameter as itpropagates away from the end of a laser constructed in accordance withthe subject invention.

FIG. 20 is a schematic diagram illustrating the coupling of the RFexcitation energy to multiple points on the hot electrode.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Turning to FIGS. 1 through 5, there is illustrated the CO₂ slabwaveguide laser 10 of the subject invention. The major parts of thelaser 10 include a cylindrical aluminum housing 20 which is vacuumsealed by a pair of end plates 22 and 24. The end plates include theadjustable mirror mount assemblies of the subject invention showngenerally as 26 and 28. The mirror mount assemblies support resonatormirrors 30 and 32. As seen in FIG. 3, mirror 30 is shorter than mirror32 for coupling light out of the cavity. Mirror assembly 26 alsosupports a window 34 for transmitting the light passing by the end ofmirror 30 out of the housing.

Within the housing 20 there are mounted a pair of planar aluminum upperand lower electrodes 36 and 38. The spacing D (FIG. 5) between theelectrodes is selected such that light will be guided between theopposed, inner surfaces of the electrodes. In the preferred embodiment,the spacing D is equal to 2 mm. In the subject design, there are noconfining elements in the plane perpendicular to the light reflectingsurfaces such that laser light is free to propagate in free spacecontrolled only by the resonator mirrors 30 and 32.

To minimize losses, the inner light reflecting surfaces of theelectrodes are machined flat to be within 0.002 inches. In addition, thesurface finish is smooth to within 32 rms microinches. In theillustrated embodiment, each electrode is 44 mm wide, 12 mm thick and61.52 cm long.

In the preferred embodiment, the lasing medium is standard CO₂ lasingmixture including helium, nitrogen and carbon dioxide with a 3:1:1 ratioplus the addition of five percent xenon. The gas is maintained between50 and 110 torr and preferably on the order of about 80 torr. The gas iselectrically excited by coupling a radio frequency generator between theelectrodes. A standard, solid state RF generator was used whichgenerated an output at 81.36 MHz at greater than four kilowatts. Theoutput of the generator is coupled into the laser using a suitableimpedance matching network (not shown) which matches the generator tothe lit discharge. In this embodiment, the RF current is connected tothe hot electrode 36 at one point through standard insulated electricalfeed through 42 that is located as close as possible to the attachmentpoint.

The other electrode 38 and the housing 20 are connected to ground. Aplurality of inductance coils 44 are electrically connected between theelectrodes to cancel any capacitance effects and control the voltagedistribution along the electrode. Preferably, the resonant frequency ofthe electrodes within the added inductors is within a few MHz of the RFexcitation frequency.

As noted above, the subject laser includes an improved support systemfor the electrodes. More specifically, the lower electrode 38 isconnected to end plate 24 via a support bracket 50. The other end of thelower electrode 38 is supported by a second support bracket 52. Thesecond support bracket is rigidly connected to the electrode. The freeend of the bracket 52 includes a pin 54 which projects into acomplementary mating recess 56 in end plate 22. The extent to which thepin is received in the recess will vary as the length of electrode 38varies during operation of the laser. In this manner, the electrode isnot constrained in a manner which could result in warping and deviationfrom the desired separation between the electrodes.

In the illustrated embodiment, a spring 58 is mounted on pin 54 of thesecond support member in a manner to abut the end plate 22. The springfunctions to provide an electrical connection further groundingelectrode 38.

As noted above, in the prior art slab lasers, the pair of electrodeswere typically separated by elongated dielectric blocks which alsoconfined the discharge and produced hard edges to the electrical filed.In contrast, in the subject laser, the means for supporting the upperelectrode from the lower electrode is spaced away from the discharge sothat sides of the discharge are apodized.

As best seen in FIGS. 6 and 7, the support means includes a pluralitydielectric brackets 60. In the preferred embodiment, there are onlythree narrow brackets 60 on each side of the electrodes so that thedischarge is substantially unblocked. Moreover, the brackets aregenerally U-shaped such that center of each bracket is spaced beyond thedischarge. By this arrangement, the discharge is only confined by theelectric field and presents a much smoother fall off in density near theedges. It is believed that this design contributes to improve modeperformance. Another advantage to this configuration is that it allowsthe hot, dissociated laser gas to flow freely out of the space betweenthe electrodes while allowing cooler gas to enter and replenish thedischarge. Still another advantage to this design is that the dischargecan be observed if windows are placed in the housing.

In order for the laser to operate effectively at higher powers, acooling system must be provided to carry heat away from the electrodes.In the subject invention, the cooling system includes a pair of upperand lower fluid carrying copper pipes 70 and 72. The ends of pipes 70,72 pass through and are electrically grounded to the end plate 24 ofhousing 20. The end segments of each of pipe rung along the length ofthe electrodes close to the inner surface of the housing. Each pipeincludes a center segment 74,75 which runs down and back along theelectrode.

In accordance with the subject invention, the outer surfaces of theelectrodes are provided with channels 76 and 78 for receiving the pipes.Preferably, the bottom of each channel is nickel plated and the centersegments 74,75 are soldered into the channel to maximize heatconduction. The depth of the channels are arranged to be close to thegeometric center of the electrodes. In this manner, any warping of theelectrodes which might arise due to stresses that are created because ofthe different thermal expansion rates of the pipes and electrodes willtend to be minimized.

As seen best in FIGS. 2, the end segments of both pipes are providedwith U-shaped bend sections 82 which are also twisted out of plane.These sections provide some flexibility for movement of the pipes asthey expand due to heat.

The upper cooling pipe 70 is further provided with a pair of insulatedsections 84. The insulated sections 84 function to electrically isolatethe center segment 74 of the pipe, which is electrically hot, from theremainder of the pipe which is electrically grounded. In the preferredembodiment, the end segments of the pipe are located very close to thegrounded housing. The insulative sections 84 are angularly oriented sothat the electrically hot portions of the pipe are spaced away from thegrounded housing and placed closer to the hot electrode 36.

As will be discussed in greater detail below, the selection of mirrorspacing in the subject laser is important for maximizing power andimproved mode control. It is desirable to place the mirrors 30, 32 farenough away from the end of the electrodes so the degradation from thedischarge is minimized. On the other hand, the mirrors must not bespaced so far away as to make the overall container unwieldy. In orderto meet this requirement from a packaging standpoint, it is necessary toplace the mirrors inside the housing 20. It is also necessary to providea means to adjust the angle of the mirrors from outside the sealedhousing to maximize performance.

The latter goals are achieved through the use of improved mirrorassemblies 26 and 28. As will be seen, these two assemblies arefunctionally equivalent. The only difference is that assembly 26includes a window 34 for transmitting the laser light.

The mirror assemblies are best seen in FIGS. 8 through 12. Each mirrorassembly is formed in an end plate 22, 24 and includes a circular groove90. The grooved extends towards the inner surface of the end plate anamount sufficient to define a radially extending, planar flexure area92. The groove 90 also defines a tilt member 94 located radially insidethe groove.

A mirror mount 96 is connected to the tilt member 94 on the innersurface of the end plate. As can be appreciated, if the angle of thetilt member is varied, the angle of the mirror mount 96 will similarlybe varied.

The mirror assembly includes a means for adjusting the angle of the tiltmember. More specifically, and as best seen in FIGS. 10 and 13, fourpins 98 are slidably mounted in the end plate in a manner to passthrough groove 90 and contact tilt member 94. Associated with each pin98 is a screw member 102 which is threadably engaged with acomplementary opening 104. By rotating a screw member, the associatedpin can be driven against the tilt member 94. As can be seen in FIGS. 8and 11, as a pin is driven into the tilt member, the tilt member willtend to rotate about the radial flexure region 92. By adjusting thepositions of the screw members and pins, the mirrors can be angularlyadjusted from the outside of the housing.

The mirrors 30 and 32 are fixedly mounted to the mirrors mounts 96. Eachmirror includes a silicon substrate to which is coated a metal coatingof either gold or silver and this is then overcoated with a dielectricstack of thorium fluoride and zinc sulfide to enhance the mirrorreflectivity at the laser wavelength. To further protect the mirror fromdegradation, a very thin top coating having a thickness of about 2microns can be added. Suitable materials for the top coating include anextra layer of thorium fluoride or germanium. Germanium better resiststhe type of scratches which occur from handling but is more subject toabsorption problems at higher powers. The extra coating layer does causesome added losses which must be balanced against improved lifetime.

As discussed above, stability, power output and mode control have beenenhanced with the resonator structure of the subject laser. Theresonator structure is best seen in FIGS. 3 and 4. More specifically,and as seen in FIG. 3, the mirrors 30 and 32 define a negative branchunstable resonator in the slab or nonwaveguide dimension. A confocalunstable resonator is the desired resonator configuration in order toproduce a collimated output beam and to achieve the maximum laserefficiency. As noted above, mirror 30 is shorter than mirror 32 andtherefore light is coupled out of the resonator just past the end ofmirror 30, through opening 110 and past window 34. The resonator isconsidered a negative branch unstable resonator because the beam crossesthe optical axis an odd number of times, in this case, once. As notedabove, in the prior art CO₂ slab waveguide lasers, only positive branchunstable resonators have been used. It is believed that despite theconventional wisdom, the negative branch unstable resonator providesenhanced performance.

In the preferred method of designing the resonator, it was firstdetermined what would be a desirable length for the gain medium. Thenthe desired output coupling was selected. In this case, it is preferableto have the output coupling be on the order of 16%. Using these twofigures, the radius of curvature of the two mirrors were selected basedon the following standard formulas:

(1) (R₁ +R₂)/2=Mirror spacing for confocal conditions and for fillingthe gain medium on one pass of the collimated beam.

(2) (M-1)/M=21% (desired output coupling) where M is equal to themagnification and is given by:

(3) R₂ /R₁ =Magnification

In the embodiment wherein the electrode length is 60 cm, the radius ofcurvature of the full size mirror 32 is 730 mm and the shorter mirror 30is 580 mm and the spacing between the mirrors is half the averagecurvature or 655 mm. Both of the mirrors are spherical and thereforehave the same radius of curvature in both dimensions.

The shorter mirror 30 or output mirror must be cut so that the spacingbetween the edge of the mirror and the edge of the discharge allows theproper fraction of the beam to pass out of the resonator. The dimensionsof this mirror depend on the width of the electrodes less a smallcorrection for edge effects and mechanical tolerances. The small mirrormust be cut so that the output beam width is the fractional outputcoupling times the effective width of the electrode. For the aboveexample, the electrodes were 44 mm wide with 1 mm for the edge andmechanical tolerances. Thus the width of the output beam is:

(4) 0.21×(44-1)mm=8.8 mm

Experiments have been performed with 40 cm electrodes. The followingnegative branch unstable resonator designs have been found acceptable.

    ______________________________________                                                       Case I Case II                                                 ______________________________________                                        Radius of Mirror 30                                                                            384 mm   377 mm                                              Radius of Mirror 32                                                                            420 mm   430 mm                                              Spacing L        402 mm   403 mm                                              ______________________________________                                    

FIG. 4 illustrates the waveguide dimension where a stable resonator isdefined. As noted above, in the prior art waveguide lasers, the mirrorswhere placed quite close to the ends of the waveguide, usually less than4 mm away which approached a Type I resonator configuration.

In contrast, in the subject invention, the ends of the waveguides arespaced from the mirrors at least 10 mm and preferably 20 mm away. Ratherthan use the prior art theory for mirror shape and placement, it hasbeen found preferable to first optimize the resonator design for theunstable resonator dimension. Once the location and radius of curvatureof the mirrors has been determined, the actual length of the waveguideelectrodes are determined to optimize the spacing in view of thecurvature of the mirrors. More specifically, the spacing between theends of the electrodes and the mirrors is selected so that the radius ofcurvature of the wavefront of the beam as it reaches the mirrors matchesthe radius of curvature of the mirrors.

The relationship between the radius of curvature of the wavefront withrespect to the distance from the end of the waveguide is illustrated inFIG. 14 In this plot, it is assumed that the light has a wavelength of10.6 microns, has a planar wavefront when exiting from a 1.9 mm squarewaveguide and that the mode structure of the light is substantiallyequivalent to a TEM₀₀ mode. If the radius of curvature of the mirrors isknown, the desired spacing can easily be matched. It is believed thatthis approach results in substantially all of the light being returnedback into the waveguide except from effects due to diffraction.

It would be understood that this resonator design approach issignificantly different from prior art teachings. For example, accordingto prior art theory, for a 1.9 mm square waveguide, one would usemirrors having a radius of curvature of 850 mm and a spacing from theend of the waveguide of 850 mm for a Type II resonator. In a Type IIIresonator the radius of curvature would be 260 mm at a distance of 130mm from the end of the waveguide. An analysis of the subject structureusing prior art theory would indicate that one should expect toexperience a loss of roughly 15%. Experimental measurements confirmedthat this resonator structure was as efficient as those used in theprior art, yet was more stable, and subject to less degradation. Inaddition, enhanced mode operation was achieved.

FIG. 15 is a plot of the average output power with operating time of a60 cm slab laser operating in a pulsed mode. The peak RF input power is1200 Watts with a pulse length of 500 μs and a 50% duty cycle. The RFpower was delivered at a frequency of 81.4 MHz to this laser and the gasmix was three parts helium to one part CO₂ to one part nitrogen and fivepercent xenon. The RF and gas mix parameters are the same for the testsshown in FIGS. 16 through 19. The total pressure is also plotted in FIG.15 and shows no significant changes from 56 torr over the duration ofthis test.

FIG. 16 shows the average output power of a 60 cm slab laser as afunction of the average RF input power. The tube had an operatingpressure of 80 torr and was operated in a pulsed mode with 300 μs pulselength and duty cycles of 10% to 50%. The peak RF power was set to 3 kWand 4 kW peaks.

FIG. 17 shows the effect on the average output power of operating thetube with different pulse lengths. It was operated in a pulsed mode withpulse length of 30 μs and 300 μs for duty cycles ranging from 10% to50%.

FIG. 18 shows the change in the average output power with increasingaverage RF input power for various gas pressures. For pulsed power of 4kW and 300 μs pulse length, the major variations in performance at thesevarious gas pressures occurs only at the highest average powers of about1800 W.

FIG. 19 shows the change in beam diameter as the beam propagates awayfrom the laser. The mode diameters were determined by measuring modeburns in 3/8 inch thick plexiglass made at about 100 W of output power.Curve fitting the beam diameter with distance indicates that this isconsistent with an M² of 1.2 in both the waveguide axis and unstableresonator axis.

One advantage to the subject laser design is that it able to quicklygenerate and maintain high pulse energies. This can be important whenthe laser is used for medical procedures. More specifically, in medicalprocedures it is desirable to vaporize larger surface areas of tissuewithout damaging the surrounding tissue from thermal heat flow. This canbe achieved by using short time duration, high power pulses from thesubject laser. In most prior art medical lasers, energies on the order50 millijoules per pulse could be delivered. In contrast, the subjectlaser can generate a peak power of 500 Watts (joules/second) for up to amillisecond at repetition rates of 500 Hz, which will allow delivery of500 millijoules per pulse, an order of magnitude greater than in thepast.

When operating at higher power levels and fast repetition rates, therewill typically be enough power to light the discharge and start thelaser. However, at low powers, (i.e. below 10 Watts average power) andlow repetition rates (i.e. more than 50 milliseconds between pulsebursts), the large impedance mismatch between the RF generator and theunlit discharge makes the delivery of that energy difficult andnoticeable delays can occur in exciting the discharge. One method ofovercoming this problem would be to run the power supply in a simmermode to keep the discharge lit and the laser generating minimal power.

In another approach, a means for preionizing the discharge can beprovided to encourage the breakdown of the laser gas. In the preferredembodiment, this means is provided by a lamp installed within thehousing and shown in phantom line at 110 in FIG. 5. Lamp 110 is a lowpressure mercury-argon quartz lamp available from Jelight of LagunaHills, Calif., part number 81-3306-2. It is believed that theultraviolet light (185 and 254 nanometers) from this lamp functions todissociate the molecules in the gas promoting the discharge. The use ofthe lamp also allows the gas to be maintained at a higher pressure whichincreases output power.

In the laser built by the applicants, the lamp is mounted beyond theimmediate discharge region, above the hot electrode. Greater efficiencycould be achieved if the lamp were mounted in a location such that theultraviolet radiation could reach the discharge more directly. It wouldalso be possible to mount the lamp outside of the housing and opposite awindow which transmitted the ultraviolet radiation into the housing.

As shown in FIG. 4, the RF energy can be coupled to the hot electrode atone end thereof. This approach has been found suitable for shortelectrodes, on the order of 40 cm. When 60 cm electrodes were employed,it was found that better performance was achieved if the RF energy wascoupled into the electrode at center of its length. In tests to scalethe laser to even longer lengths, it was found that delivery of the RFenergy at a single point created an uneven discharge since the length ofthe electrode began to correspond to the length of the RF waves.

Accordingly, when the electrode length is 80 cm or longer, it isdesirable to couple the RF energy into the electrodes at more than onelocation. However, the RF energy coupled into the laser at both pointsmust be in phase. FIG. 20 illustrates the one approach to achieve thisresult.

The laser in FIG. 20 includes a pair of electrodes 120 and 122. The RFenergy is coupled to the hot electrode 120 at two locations. The energyis generated by a pair of amplifiers 124 and 126 which are driven by acommon oscillator 128 which keeps the amplifiers in phase. The outputfrom the amplifiers is passed through individual impedance matchingnetworks 132 and 134 to the hot electrode. A combiner 136 can beinterposed between the amplifiers 124, 126 and the respective matchingnetworks 132, 134 to control the interaction between amplifiers and theload provided by the laser tube so that each amplifier will provide thesame power to the laser. All of the electrical leads should be of thesame length to insure that the energy delivered to both points on theelectrode 120 is in phase. Using this approach, a more stable and evendischarge can be maintained.

Although not illustrated, an additional mechanism to reduce degradationof the mirrors would be to add ceramic spacers to the ends of thewaveguide electrodes. The ceramic spacers would still function to guidethe light, but the discharge would terminate at the end of the aluminumelectrodes. The ceramic material would interact with neutral and ionicmolecular fragments to reduce their diffusion toward the mirror surface.If left to diffuse toward the mirror surface, these molecular fragmentsare believed to lead to degradation of the mirror surface.

In summary, there has been disclosed a CO₂ slab waveguide laser. Thelaser includes a pair of spaced apart electrodes having opposed lightreflecting surfaces. The electrodes are dimensioned in a manner to guidelight in a plane perpendicular to the reflecting surfaces. Lightparallel to the reflecting surfaces is not constrained other than by theresonator mirrors. The resonator structure includes a negative branchunstable resonator in the nonwaveguide dimension. A stable resonator isused in the waveguide dimension but the mirror spacing from the end ofthe guide is based in part on the configuration of the unstableresonator.

A unique support structure is disclosed for maintaining the electrodesin a spaced apart orientation without confining the discharge. Furtherrefinements are disclosed for cooling the laser and for accommodatingthermal expansion of the parts. Finally, an improved adjustable mirrorassembly is provided which allows the tilt angle of the mirror to bevaried from outside of the housing.

While the subject invention has been described with reference to apreferred embodiment, various changes and modifications could be madetherein, by one skilled in the art, without varying from the scope andspirit of the subject invention as defined by the appended claims.

I claim:
 1. An adjustable mirror assembly for attachment to the end of ahousing of a laser, said assembly comprising:an end plate for attachmentto the end of the housing of said laser, wherein said attachmentprovides a vacuum seal between the assembly and the housing, with theouter surface of said plate having a circular groove extending to adepth sufficient to define a flexure area between the bottom of thegroove and the inner surface of the plate, and with the portion of theplate radially inward of said groove defining a tilt member; a mirrormount for supporting a mirror, said mount being connected to the innersurface of said plate, radially inwardly of said groove and on said tiltmember; and means, mounted to said plate and outside of said housing forapplying a torque to said tilt member in order to adjust the angle ofsaid mirror mount.
 2. An assembly as recited in claim 1 wherein saidmeans for applying torque to the tilt member consists of a plurality ofpins, slidably mounted within said plate radially outward of said grooveand about the circumference of said tilt member, with the radialposition of said pins being adjustable in a manner to place a varyingtorque on said tilt member.